As semiconductor patterning continues to scale, even small layout nonuniformities can lead to noticeably different process outcomes. Real chip layouts contain a mix of dense regions, large open ...

For past several decades, the processor industry has enjoyed the benefits of chip miniaturization and the exponential increase in the number of on-chip transistors as predicted by Moore's law. However ...

How to avoid wafer-based testing during early technology development using a model to determine the optimal Si recess depth target and process window prior to source/drain epitaxy. A new methodology ...